Lam 9600
TīmeklisMachine Serial Number 4065. Chamber config Type TCP 9400SE. TCP RF Match Part No. 853-032294-002. Bias RF Match 853-025083-001. ESC Power Supply 810-017086-010. Chamber manometer. MKS Make (All) E29B-23813. Turbo Manometer MKS Make (All) 625A11TDE. Ref Manometer MKS Make (All) 625A11TDE. Tīmeklis2024. gada 27. sept. · The LAM 9400 SE is a high density plasma etch tool manufactured by LAM Research Corporation. This tool was originally designed for production polysilicon etching, but has been reconfigured for silicon based materials, III‐Vs, some metals, and organic materials. It uses a TCP (transformer coupled …
Lam 9600
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TīmeklisThe Lam 9600 is intended to etch aluminum metal and TiW layers with highly vertical sidewalls suitable for 0.35 um linewidth. The plasma is a medium-high density, … TīmeklisLAM 5" diffusers for AutoEtch 490/ LAM AutoEtch 590. LAM Electrode (Electrostatic Chuck/ESC) for LAM TCP 9600, Part Number: 718-094756-081. LAM TCP 9600SE Ring, FOR, LWR CHAMBER, ESC. LAM TCP 9600SE Ring, RING, FOCUS 8”, GD RING. LAM TCP 9600SE Computer. LAM TCP 9600SE ASSY, GATE DRIVE, …
TīmeklisLam Model TCP 9600SE Contact for pricing and inspection. Equipment is currently installed in FAB, and can be viewed upon request. LAM Model TCP 9600SE WITH … TīmeklisLAM 9600. 1/1 LAM 9600. Ref : 2257608-9-MT. Condition : Used. Manufacturer : LAM. Model : 9600. Year(s) :-Quantity : 1. Location : Seller or machines location: …
TīmeklisLAM 9600. 1/1 LAM 9600. Ref : 2257608-9-MT. Condition : Used. Manufacturer : LAM. Model : 9600. Year(s) :-Quantity : 1. Location : Seller or machines location: AMERICA North (USA-Canada-Mexico) Mounting Bulkhead Wafer Size 200 MM Software Envision 1.52 Indexers HINE AC Box -001 Gas Box Orbital Welded ... http://www.semistarcorp.com/product/lam-tcp9408-se-4065/
TīmeklisThis data set consists of the engineering variables from a LAM 9600 Metal Etcher over the course of etching 129 wafers. The data consists of 108 normal wafers taken …
TīmeklisThe ESC for 4520-Excelan has much better backside cooling and no wafer sticking. Better backside He leakrates. Replaces OEM AlN, needs no perimeter lift pins. This … clearwater hospital floridaTīmeklisLam Rainbow 9600 Metal Etch System Location: ICL What it does: metal dry etcher Introduction: The Lam Rainbow model 9600 etch system is designed for metal etching of Aluminum, Aluminum Silicon and a limited number of other metals and metal alloys. This system is a single wafer processor and is intended to operate in the automatic mode … clearwater hospital clinicTīmeklisLAM TCP 9600 SE II Rainbows are a common workhorse machine and have lost much of their supportability over time. We know them well. LAM Rainbow 4420 LAM Rainbow 4420XL LAM Rainbow 4520 LAM Rainbow 4520XL LAM Rainbow 4520i LAM Rainbow 4620 LAM Rainbow 4720 clearwater homes for sale zillowhttp://photonicmicrodevices.com/LAM_Research_9600.html clearwater hospital flTīmeklisLAM 9600, TCP Metal Etch System Check for Exchange Availability Price: Get a Quote Refurbished with installation and warranty System can be reconfigured to match … clearwater hospital orofinohttp://www.eigenvector.com/Docs/robustness.pdf clearwater hospital orofino idTīmeklisExperimental setup using the Lam TCP 9600. The schematic diagram of the experimental setup is shown in Fig. 1. The experiments were performed in a TCP aluminum etcher (LAM TCP 9600). The rf-power (up to 600 W, 13.56 MHz) is coupled through an impedance matching network to the pancake-type coil which is mounted … clearwater hospital orofino idaho